Products for Industry

Plasma Cleaner (Parallel Electrode) PDC610

Item Code : 328216
Model : PDC610

Plasma Cleaner (Parallel Electrode) (PDC610)

Plasma Cleaner (Parallel Electrode)PDC610

Product Summary

Plasma Surface Treatment Device

Features of Plasma Cleaner (Parallel Electrode) (PDC610)

Compact plasma cleaner for R&D or any other wide range of applications
Max. RF power 600W
RIE / DP mode switchable
Electrodes can be set among 1 to 3 stages
Integrated data logger can be installed (Optional)
Matching point memory function can be installed (Optional)



Item Code 328216
Model PDC610
Plasma Mode RIE and DP mode changeable by touch panel
Electrode Structure 3-stage independent parallel flat stage
RF Power MAX. 600W
Oscillation Frequency 13.56MHz Quartz Oscillator
Chamber Dimensions W350 × D270 × H300mm
Stage Size W250 × D220mm x 3 stages
Chamber Material Aluminium
Reaction Gas 2 systems(Ar, O2)
Purge Gas N2 or Dry air
Vacuum Pump Included (Approx. 345 L/min)
Gas Inlet Port Reaction Gas: 2 points, Purge Gas: 1 point
Output Setting Manual setting on LED touch panel
Internal dimensions(W×D×H mm) 350×270×300mm
External dimensions(W×D×H mm) 600×722×700mm
Power Source AC220V~AC415V
Three phase with step-down transformer
Weight 170kg

Maintenance and warranty

Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.


Same series products

Plasma Cleaner (Parallel Electrode) (PDC200)
Plasma Cleaner (Parallel Electrode) (PDC210)
Plasma Cleaner (Parallel Electrode) (PDC510)