Products for Industry

Plasma Cleaner (Parallel Electrode) PDC510

Item Code : 215054
Model : PDC510

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Plasma Cleaner (Parallel Electrode) (PDC510)

Plasma Cleaner (Parallel Electrode)PDC510

Product Summary

Plasma Surface Treatment Device

Features of Plasma Cleaner (Parallel Electrode) (PDC510)

Small and compact, suitable for R&D or any other dry cleaning processes
Simple and compact plasma surface treatment device
Feature
RIE / DP mode changeable
Feature
Excellent electrode structure for plasma uniformity
Feature
Touch panel for easy operation
Feature
Equipped with 0 point stability vacuum manometer

Specifications

Specifications

Item Code 215054
Model PDC510
Plasma Mode RIE / DP mode changeable
Electrode Structure Parallel flat stage
RF Power MAX. 500W
Oscillation Frequency 13.56MHz Quartz Oscillator
Display LED touch panel
Chamber Dimensions W500 × D300 × H200mm
Stage Size W400 × D200mm
Chamber Material Aluminium
Reaction Gas 2 systems(Ar, O2)
Purge Gas N2 or Dry air
Reaction Gas Flow Control Mass flow controller
Vacuum Pump Included (Aprox. 500 L/min)
Gas Inlet Port Reaction Gas: 2 points, Purge Gas: 1 point
Internal dimensions(W×D×H mm) 500×300×200mm
External dimensions(W×D×H mm) 700×700×1285mm
Power Source AC200V~AC415V
Three phase with step-down transformer
Weight 180kg

Maintenance and warranty


Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.



Catalog

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