Products for Industry

Plasma Cleaner (Parallel Electrode) PDC210

Item Code : 328211
Model : PDC210

Interior

Plasma Cleaner (Parallel Electrode) (PDC210)

Plasma Cleaner (Parallel Electrode)PDC210

Product Summary

Small and compact, suitable for R&D or any other dry cleaning processes

Features of Plasma Cleaner (Parallel Electrode) (PDC210)

Plasma Surface Treatment Device
Simple and compact plasma surface treatment device
Feature
RIE mode (DP mode is optional)
Feature
Excellent electrode structure for plasma uniformity
Feature
Touch panel for easy operation
Feature
Equipped with 0 point stability vacuum manometer

Specifications

Specifications

Item Code 328211
Model PDC210
Plasma Mode RIE(DP mode is optional)
Electrode Structure Parallel flat stage
RF Power MAX. 500W
Oscillation Frequency 13.56MHz Quartz Oscillator
Display LED touch panel
Chamber Dimensions W400 × D250 × H150mm
Stage Size W250 × D170mm
Chamber Material Aluminium
Reaction Gas 2 systems(Ar, O2)
Purge Gas N2 or Dry air
Reaction Gas Flow Control Mass flow controller
Vacuum Pump Included (345 L/min)
Gas Inlet Port Reaction Gas: 2 points, Purge Gas: 1 point
Internal dimensions(W×D×H mm) 400×250×150mm
External dimensions(W×D×H mm) 540×600×600mm
Power Source AC220V ~AC415V
Three phase with step-down transformer
Weight 105kg

Maintenance and warranty


Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.



Catalog

Same series products

Plasma Cleaner (Parallel Electrode) (PDC200)
Plasma Cleaner (Parallel Electrode) (PDC510)
Plasma Cleaner (Parallel Electrode) (PDC610)