Products for Industry

Plasma Cleaner (Parallel Electrode) PDC200

Item Code : 328210
Model : PDC200



Plasma Cleaner (Parallel Electrode) (PDC200)

Plasma Cleaner (Parallel Electrode)PDC200

Product Summary

Plasma Surface Treatment Device

Features of Plasma Cleaner (Parallel Electrode) (PDC200)

Small and compact, suitable for R&D or any other dry cleaning processes
Simple and compact plasma surface treatment device
RIE mode
Excellent electrode structure for plasma uniformity
Touch panel for easy operation
Equipped with 0 point stability vacuum manometer



Item Code 328210
Model PDC200
Plasma Mode RIE(DP mode is optional)
Electrode Structure Parallel flat stage
RF Power MAX. 300W
Oscillation Frequency 13.56MHz Quartz Oscillator
Display LED touch panel
Chamber Dimensions W400 × D250 × H150mm
Stage Size W250 × D170mm
Chamber Material Aluminium
Reaction Gas 2 systems(Ar, O2)
Purge Gas N2 or Dry air
Reaction Gas Flow Control Flow meter
Vacuum Pump Not included (Recommend : 345L/min. or more)
Gas Inlet Port Reaction Gas: 2 points, Purge Gas: 1 point
Internal dimensions(W×D×H mm) 400×250×150mm
External dimensions(W×D×H mm) 540×600×600mm
Power Source AC115V/AC220V
Single phase with step-down transformer
Weight 100kg

Maintenance and warranty

Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.


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Plasma Cleaner (Parallel Electrode) (PDC210)
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