Products for Industry
Plasma Cleaner (Parallel Electrode) PDC200
Item Code : 328210
Model : PDC200
PDC200
Interior
Plasma Cleaner (Parallel Electrode) (PDC200)
Product Summary
Plasma Surface Treatment Device
Features of Plasma Cleaner (Parallel Electrode) (PDC200)
- Small and compact, suitable for R&D or any other dry cleaning processes
- Simple and compact plasma surface treatment device
- Feature
- RIE mode
- Feature
- Excellent electrode structure for plasma uniformity
- Feature
- Touch panel for easy operation
- Feature
- Equipped with 0 point stability vacuum manometer
Specifications
Specifications
| Item Code | 328210 |
|---|---|
| Model | PDC200 |
| Plasma Mode | RIE（DP mode is optional） |
| Electrode Structure | Parallel flat stage |
| RF Power | MAX. 300W |
| Oscillation Frequency | 13.56MHz Quartz Oscillator |
| Display | LED touch panel |
| Chamber Dimensions | W400 × D250 × H150mm |
| Stage Size | W250 × D170mm |
| Chamber Material | Aluminium |
| Reaction Gas | 2 systems（Ar, O2） |
| Purge Gas | N2 or Dry air |
| Reaction Gas Flow Control | Flow meter |
| Vacuum Pump | Not included (Recommend : 345L/min. or more) |
| Gas Inlet Port | Reaction Gas: 2 points, Purge Gas: 1 point |
| Internal dimensions（W×D×H mm） | 400×250×150mm |
| External dimensions（W×D×H mm） | 540×600×600mm |
| Power Source |
AC115V/AC220V
Single phase with step-down transformer |
| Weight | 100kg |
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.
