Products for Industry

Plasma Cleaner (Parallel Electrode) V1000XS

Item Code : 328214
Model : V1000XS


Plasma Cleaner (Parallel Electrode) (V1000XS)

Plasma Cleaner (Parallel Electrode)V1000XS

Product Summary

Big capacity model suitable for dry cleaning process such as the removal of organic substances, oxidized film, and for surface cleaning, etching, etc.

Features of Plasma Cleaner (Parallel Electrode) (V1000XS)

High-precision matching unit and highly reliable RF generator



Item Code 328214
Model V1000XS
Plasma Mode DP/RIE
Oscillation Frequency 13.56MHz
RF Power 1,000 ~ 2,000W
Stage Dimensions 400W × 375D mm, Parallel flat stage plate (Multi)
Reaction Gas Mass flow control, 2 system + 1 for purge gas
Vacuum Pump Included, Approx. 1,000L~1500L/min exhaust volume
Safety Device Door switch, Interlock of side panel, Emergency stop switch, Overheat prevention device
Internal dimensions(W×D×H mm) 600×554×440mm
External dimensions(W×D×H mm) 900×1000×2040mm
Remarks(dimensions) Stage dimensions: 400W x 375D mm
Power Source AC220V~AC415V
3-phase with step-down transformer

Maintenance and warranty

Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.


Same series products

Plasma Cleaner (Parallel Electrode) (V1000)