Products for Industry
Plasma Cleaner (Parallel Electrode) V1000XS
Item Code : 328214
Model : V1000XS
Plasma Cleaner (Parallel Electrode) (V1000XS)
Product Summary
Big capacity model suitable for dry cleaning process such as the removal of organic substances, oxidized film, and for surface cleaning, etching, etc.
Features of Plasma Cleaner (Parallel Electrode) (V1000XS)
- Feature
- High-precision matching unit and highly reliable RF generator
Specifications
Specifications
Item Code | 328214 |
---|---|
Model | V1000XS |
Plasma Mode | DP/RIE |
Oscillation Frequency | 13.56MHz |
RF Power | 1,000 ~ 2,000W |
Stage Dimensions | 400W × 375D mm, Parallel flat stage plate (Multi) |
Reaction Gas | Mass flow control, 2 system + 1 for purge gas |
Vacuum Pump | Included, Approx. 1,000L~1500L/min exhaust volume |
Safety Device | Door switch, Interlock of side panel, Emergency stop switch, Overheat prevention device |
Internal dimensions(W×D×H mm) | 600×554×440mm |
External dimensions(W×D×H mm) | 900×1000×2040mm |
Remarks(dimensions) | Stage dimensions: 400W x 375D mm |
Power Source |
AC220V~AC415V
3-phase with step-down transformer |
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.