Products for Industry
Plasma Cleaner (Parallel Electrode) V1000
Item Code : 328212
Model : V1000
Plasma Cleaner (Parallel Electrode) (V1000)
Product Summary
Suitable for dry cleaning process such as the removal of organic substances, oxidized film, and for surface cleaning, etching, etc.
Features of Plasma Cleaner (Parallel Electrode) (V1000)
- Plasma Surface Cleaning Device
- The electrodes can be replaced by specially developed electrodes to improve the plasma efficiency
- Feature
- High-precision matching unit and highly reliable RF generator
Specifications
Specifications
Item Code | 328212 |
---|---|
Model | V1000 |
Plasma Mode | DP/RIE |
Oscillation Frequency | 13.56MHz |
RF Power | 1,000W |
Stage Dimensions | 280W × 280D mm Parallel flat stage |
Reaction Gas | Mass flow control, 2 system + 1 for purge gas |
Vacuum Pump | Included, Approx. 1,000L/min exhaust volume |
Safety Device | Door switch, Interlock of side panel, Emergency stop switch, Overheat prevention device |
Internal dimensions(W×D×H mm) | 400×400×380mm |
External dimensions(W×D×H mm) | 700×800×1600mm |
Remarks(dimensions) | Stage dimensions: 280W x 280D mm |
Power Source |
AC220V~AC 415V
3-phase with step-down transformer |
Weight | 1000kg |
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.