Products for Industry

Plasma Cleaner (Parallel Electrode) V1000

Item Code : 328212
Model : V1000

V1000

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Plasma Cleaner (Parallel Electrode) (V1000)

Plasma Cleaner (Parallel Electrode)V1000

Product Summary

Suitable for dry cleaning process such as the removal of organic substances, oxidized film, and for surface cleaning, etching, etc.

Features of Plasma Cleaner (Parallel Electrode) (V1000)

Plasma Surface Cleaning Device
The electrodes can be replaced by specially developed electrodes to improve the plasma efficiency
Feature
High-precision matching unit and highly reliable RF generator

Specifications

Specifications

Item Code 328212
Model V1000
Plasma Mode DP/RIE
Oscillation Frequency 13.56MHz
RF Power 1,000W
Stage Dimensions 280W × 280D mm Parallel flat stage
Reaction Gas Mass flow control, 2 system + 1 for purge gas
Vacuum Pump Included, Approx. 1,000L/min exhaust volume
Safety Device Door switch, Interlock of side panel, Emergency stop switch, Overheat prevention device
Internal dimensions(W×D×H mm) 400×400×380mm
External dimensions(W×D×H mm) 700×800×1600mm
Remarks(dimensions) Stage dimensions: 280W x 280D mm
Power Source AC220V~AC 415V
3-phase with step-down transformer
Weight 1000kg

Maintenance and warranty


Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.



Catalog

Same series products

Plasma Cleaner (Parallel Electrode) (V1000XS)