Products for Industry

Plasma Reactor (Barrel Chamber) PR301

Item Code : 215008
Model : PR301


Plasma Reactor (Barrel Chamber) (PR301)

Plasma Reactor (Barrel Chamber)PR301

Product Summary

Compact, Barrel Type, Low Temperature Ashing Device

Features of Plasma Reactor (Barrel Chamber) (PR301)

Wide range of application such as ashing, etching, dry cleaning, etc.
RF Power: 300W
Space-saving due to the compact design
Adjustable RF power for various application
Flexible setting range of output to cope with a variety of testings



Item Code 215008
Model PR301
System DP mode, Barrel type
High Frequency Output Max. 300W
Oscillation Frequency 13.56MHz
Tuning Method Manual biaxial
Reaction Chamber Pyrex Glass φ118 × L160mm x 1 chamber
Reaction Gas System 1 system (oxygen), flow meter
Control System Auto pressure regulation and Auto leakage valve
Piping Material SUS, Teflon
Accessory Vacuum grease x 1 pc, O-ring for reaction chamber x 1 pc
Internal dimensions(φ×D mm) φ118×160mm
External dimensions(W×D×H mm) 438×520×630mm
Remarks(dimensions) 118φ x 160Dmm x 1 chamber
Power Source AC115V/AC220V
Single phase with step-down transformer
Weight 34kg

Maintenance and warranty

Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.


Same series products

Plasma Reactor (Barrel Chamber) (PR200)
Plasma Reactor (Barrel Chamber) (PR300)
Plasma Reactor (Barrel Chamber) (PR500)
Plasma Reactor (Barrel Chamber) (PR510)