Products for Industry
Plasma Reactor (Barrel Chamber) PR510
Item Code : 215012
Model : PR510
Plasma Reactor (Barrel Chamber) (PR510)
Product Summary
Compact, Barrel Type, Low Temperature Ashing Device
Features of Plasma Reactor (Barrel Chamber) (PR510)
- Designed with large chamber size made of quartz considered almost completely resistant against most plasma processes
- RF Power: Max. 500W
- Feature
- Space-saving design with oscillation section integrated with a portion of the chamber
- Feature
- Equipped with a large quartz chamber (φ215mm) which can process bigger testing samples
- Feature
- Outstanding operability and safety by the automatic tuning system equipped as a standard function
Specifications
Specifications
Item Code | 215012 |
---|---|
Model | PR510 |
System | DP mode, Barrel type |
High Frequency Output | Max. 500W |
Oscillation Frequency | 13.56MHz |
Tuning Method | Automatic tuning |
Reaction Chamber | Quartz φ215 × L305 mm x 1 chamber |
Reaction Gas System | Dual system (oxygen/CF4) |
Control System | Automatic touch panel |
Piping Material | SUS, Teflon |
Accessories | Vacuum grease: 1 pc., O-ring for reaction chamber: 1 pc. |
Internal dimensions(φ×D mm) | φ215×305mm |
External dimensions(W×D×H mm) | 520×630×760mm |
Remarks(dimensions) | 215φ x 305Dmm x 1 chamber |
Power Source |
AC220V~AC415V
Three phase with step-down transformer |
Weight | 70kg |
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.