Products for Industry
Plasma Cleaner (Parallel Electrode) PDC210
Item Code : 328211
Model : PDC210
Interior
Plasma Cleaner (Parallel Electrode) (PDC210)
Product Summary
Small and compact, suitable for R&D or any other dry cleaning processes
Features of Plasma Cleaner (Parallel Electrode) (PDC210)
- Plasma Surface Treatment Device
- Simple and compact plasma surface treatment device
- Feature
- RIE mode (DP mode is optional)
- Feature
- Excellent electrode structure for plasma uniformity
- Feature
- Touch panel for easy operation
- Feature
- Equipped with 0 point stability vacuum manometer
Specifications
Specifications
| Item Code | 328211 |
|---|---|
| Model | PDC210 |
| Plasma Mode | RIE（DP mode is optional） |
| Electrode Structure | Parallel flat stage |
| RF Power | MAX. 500W |
| Oscillation Frequency | 13.56MHz Quartz Oscillator |
| Display | LED touch panel |
| Chamber Dimensions | W400 × D250 × H150mm |
| Stage Size | W250 × D170mm |
| Chamber Material | Aluminium |
| Reaction Gas | 2 systems（Ar, O2） |
| Purge Gas | N2 or Dry air |
| Reaction Gas Flow Control | Mass flow controller |
| Vacuum Pump | Included (345 L/min) |
| Gas Inlet Port | Reaction Gas: 2 points, Purge Gas: 1 point |
| Internal dimensions（W×D×H mm） | 400×250×150mm |
| External dimensions（W×D×H mm） | 540×600×600mm |
| Power Source |
AC220V ~AC415V
Three phase with step-down transformer |
| Weight | 105kg |
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.
