Products for Industry
Plasma Reactor (Barrel Chamber) PR301
Item Code : 215008
Model : PR301
PR301
Plasma Reactor (Barrel Chamber) (PR301)
Product Summary
Compact, Barrel Type, Low Temperature Ashing Device
Features of Plasma Reactor (Barrel Chamber) (PR301)
- Wide range of application such as ashing, etching, dry cleaning, etc.
- RF Power: 300W
- Feature
- Space-saving due to the compact design
- Feature
- Adjustable RF power for various application
- Feature
- Flexible setting range of output to cope with a variety of testings
Specifications
Specifications
| Item Code | 215008 |
|---|---|
| Model | PR301 |
| System | DP mode, Barrel type |
| High Frequency Output | Max. 300W |
| Oscillation Frequency | 13.56MHz |
| Tuning Method | Manual biaxial |
| Reaction Chamber | Pyrex Glass φ118 × L160mm x 1 chamber |
| Reaction Gas System | 1 system (oxygen), flow meter |
| Control System | Auto pressure regulation and Auto leakage valve |
| Piping Material | SUS, Teflon |
| Accessory | Vacuum grease x 1 pc, O-ring for reaction chamber x 1 pc |
| Internal dimensions（φ×D mm） | φ118×160mm |
| External dimensions（W×D×H mm） | 438×520×630mm |
| Remarks(dimensions) | 118φ x 160Dmm x 1 chamber |
| Power Source |
AC115V/AC220V
Single phase with step-down transformer |
| Weight | 34kg |
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.
