Products for Industry

Plasma Reactor (Barrel Chamber) PR510

Item Code : 215012
Model : PR510

Plasma Reactor (Barrel Chamber) (PR510)

Plasma Reactor (Barrel Chamber)PR510

Product Summary

Compact, Barrel Type, Low Temperature Ashing Device

Features of Plasma Reactor (Barrel Chamber) (PR510)

Designed with large chamber size made of quartz considered almost completely resistant against most plasma processes
RF Power: Max. 500W
Space-saving design with oscillation section integrated with a portion of the chamber
Equipped with a large quartz chamber (φ215mm) which can process bigger testing samples
Outstanding operability and safety by the automatic tuning system equipped as a standard function



Item Code 215012
Model PR510
System DP mode, Barrel type
High Frequency Output Max. 500W
Oscillation Frequency 13.56MHz
Tuning Method Automatic tuning
Reaction Chamber Quartz φ215 × L305 mm x 1 chamber
Reaction Gas System Dual system (oxygen/CF4)
Control System Automatic touch panel
Piping Material SUS, Teflon
Accessories Vacuum grease: 1 pc., O-ring for reaction chamber: 1 pc.
Internal dimensions(φ×D mm) φ215×305mm
External dimensions(W×D×H mm) 520×630×760mm
Remarks(dimensions) 215φ x 305Dmm x 1 chamber
Power Source AC220V~AC415V
Three phase with step-down transformer
Weight 70kg

Maintenance and warranty

Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.


Same series products

Plasma Reactor (Barrel Chamber) (PR200)
Plasma Reactor (Barrel Chamber) (PR300)
Plasma Reactor (Barrel Chamber) (PR301)
Plasma Reactor (Barrel Chamber) (PR500)