Products for Industry

Plasma Cleaner (Parallel Electrode, Compact)PiPi

Item Code : 00
Model : PiPi

Plasma Cleaner (Parallel Electrode, Compact) (PiPi)

Plasma Cleaner (Parallel Electrode, Compact)PiPi

Product Summary

Small and compact, suitable for R&D purposes

Features of Plasma Cleaner (Parallel Electrode, Compact) (PiPi)

Small and compact, suitable for R&D purposes
Compact design, RIE (Reactive Ion Etching) mode
Feature
Economical plasma cleaning machine
Feature
Simple plasma processing operation
Feature
Among the plasmatized gases, in addition to ions and electrons, there are electrically neutral atoms and molecules that electrons have moved to the electrical excitation.
Feature
By sputtering effect by ions, it is possible to remove not only organic matter on the surface of the object but also inorganic matter.

Specifications

Specifications

Item Code 00
Model PiPi
Model PiPi
Plasma mode RIE (reactive ion etching)
Electrode structure Parallel flat panel type
Electrode dimensions W130×D130mm
Internal dmensions W230×D130×H100mm
External dimensions W438×D520×H565mm
Power source (50/60Hz) AC115V/AC220V Single phase with step-down transformer
Vacuum meter Bourdon gauge
Controller Sequencer
Operation/display unit 4.5-inch monochrome STN touch panel
High-frequency out-put power 50-200W
Reference oscillator Quarts oscillator
Oscillation frequency 13.56MHz
Output setting Manual setting knob
Matching method Auto tuning
Purge gas N2 1/4-inch bite type tube fitting
Reaction gas Ar mass flow meter 1/4-inch bite type tube fitting
Internal dimensions(W×D×H mm) 230×130×100mm
External dimensions(W×D×H mm) 438×520×565mm
Remarks(weight) 115V
/220V Single phase with step-down transformer
Weight 50kg