Products for Industry
Plasma Cleaner (Parallel Electrode) PDC610
Item Code : 328216
Model : PDC610
Plasma Cleaner (Parallel Electrode) (PDC610)
Product Summary
Plasma Surface Treatment Device
Features of Plasma Cleaner (Parallel Electrode) (PDC610)
- Compact plasma cleaner for R&D or any other wide range of applications
- Max. RF power 600W
- Feature
- RIE / DP mode switchable
- Feature
- Electrodes can be set among 1 to 3 stages
- Feature
- Integrated data logger can be installed (Optional)
- Feature
- Matching point memory function can be installed (Optional)
Specifications
Specifications
Item Code | 328216 |
---|---|
Model | PDC610 |
Plasma Mode | RIE and DP mode changeable by touch panel |
Electrode Structure | 3-stage independent parallel flat stage |
RF Power | MAX. 600W |
Oscillation Frequency | 13.56MHz Quartz Oscillator |
Chamber Dimensions | W350 × D270 × H300mm |
Stage Size | W250 × D220mm x 3 stages |
Chamber Material | Aluminium |
Reaction Gas | 2 systems(Ar, O2) |
Purge Gas | N2 or Dry air |
Vacuum Pump | Included (Approx. 345 L/min) |
Gas Inlet Port | Reaction Gas: 2 points, Purge Gas: 1 point |
Output Setting | Manual setting on LED touch panel |
Internal dimensions(W×D×H mm) | 350×270×300mm |
External dimensions(W×D×H mm) | 600×722×700mm |
Power Source |
AC220V~AC415V
Three phase with step-down transformer |
Weight | 170kg |
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.