Products for Industry
Plasma Cleaner (Parallel Electrode) PDC200
Item Code : 328210
Model : PDC200
Plasma Cleaner (Parallel Electrode) (PDC200)
Product Summary
Plasma Surface Treatment Device
Features of Plasma Cleaner (Parallel Electrode) (PDC200)
- Small and compact, suitable for R&D or any other dry cleaning processes
- Simple and compact plasma surface treatment device
- Feature
- RIE mode
- Feature
- Excellent electrode structure for plasma uniformity
- Feature
- Touch panel for easy operation
- Feature
- Equipped with 0 point stability vacuum manometer
Specifications
Specifications
Item Code | 328210 |
---|---|
Model | PDC200 |
Plasma Mode | RIE(DP mode is optional) |
Electrode Structure | Parallel flat stage |
RF Power | MAX. 300W |
Oscillation Frequency | 13.56MHz Quartz Oscillator |
Display | LED touch panel |
Chamber Dimensions | W400 × D250 × H150mm |
Stage Size | W250 × D170mm |
Chamber Material | Aluminium |
Reaction Gas | 2 systems(Ar, O2) |
Purge Gas | N2 or Dry air |
Reaction Gas Flow Control | Flow meter |
Vacuum Pump | Not included (Recommend : 345L/min. or more) |
Gas Inlet Port | Reaction Gas: 2 points, Purge Gas: 1 point |
Internal dimensions(W×D×H mm) | 400×250×150mm |
External dimensions(W×D×H mm) | 540×600×600mm |
Power Source |
AC115V/AC220V
Single phase with step-down transformer |
Weight | 100kg |
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.