Products for Industry
Plasma Cleaner (Parallel Electrode) PDC210
Item Code : 328211
Model : PDC210
Plasma Cleaner (Parallel Electrode) (PDC210)
Product Summary
Small and compact, suitable for R&D or any other dry cleaning processes
Features of Plasma Cleaner (Parallel Electrode) (PDC210)
- Plasma Surface Treatment Device
- Simple and compact plasma surface treatment device
- Feature
- RIE mode (DP mode is optional)
- Feature
- Excellent electrode structure for plasma uniformity
- Feature
- Touch panel for easy operation
- Feature
- Equipped with 0 point stability vacuum manometer
Specifications
Specifications
Item Code | 328211 |
---|---|
Model | PDC210 |
Plasma Mode | RIE(DP mode is optional) |
Electrode Structure | Parallel flat stage |
RF Power | MAX. 500W |
Oscillation Frequency | 13.56MHz Quartz Oscillator |
Display | LED touch panel |
Chamber Dimensions | W400 × D250 × H150mm |
Stage Size | W250 × D170mm |
Chamber Material | Aluminium |
Reaction Gas | 2 systems(Ar, O2) |
Purge Gas | N2 or Dry air |
Reaction Gas Flow Control | Mass flow controller |
Vacuum Pump | Included (345 L/min) |
Gas Inlet Port | Reaction Gas: 2 points, Purge Gas: 1 point |
Internal dimensions(W×D×H mm) | 400×250×150mm |
External dimensions(W×D×H mm) | 540×600×600mm |
Power Source |
AC220V ~AC415V
Three phase with step-down transformer |
Weight | 105kg |
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.